SemiGroup can save you money on expensive wafer fab consumable parts.
Wafer fab consumables are critical for safety and performance, and when your part goes out, you can count on SemiGroup to provide your business with high quality consumable parts that meet or exceed OEM standards – without breaking the bank!
Don’t let OEMs take advantage of your situation and pressure you into buying exclusively their parts at high prices. There’s another way!
For over 22 years, SemiGroup has supplied thousands of consumable replacement parts to customers that meet or exceed OEM standards with significant cost savings.
Our experienced engineers & technicians are trained and certified in semiconductor OEM parts & systems refurbishment. All our parts and systems go through the same rigorous testing you would expect from an OEM. We’re open and here for you!
Available Types of Consumable Parts
- Silicon Parts
- Silicon Carbide Parts
- Aluminum Parts
- Sapphire Parts
- Sapphire Coated Parts
- Ferrofluidic Seals
- O-rings & Seals
- Plastic Parts
- Teflon Parts
- Ceramic Parts
- Quartz Parts
- Bearings
- Stainless Steel Parts
- Plasma Applicator Tubes
- Targets
- Impellers
- Filters
- Bellows
- End Effectors
Recently Added
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Out of Stock
000M2467-513 | Pin Cross Retainer 200mm for Semitool
Call 1-888-736-4476 to check availability.
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000M4663-01 | Short Pin 200mm for Semitool
Call 1-888-736-4476 to check availability.
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000M4663-03 | Long Pin 200mm for Semitool
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0010-03151 | Applied Materials Electronic Box, Brush, 300 MM HVM
Call 1-888-736-4476 to check availability.
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0010-03151 | Applied Materials Electronic Box, Brush, 300 MM HVM
Call 1-888-736-4476 to check availability.
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0010-05398 | Applied Materials Brush Mount Assembly
Call 1-888-736-4476 to check availability.
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0010-05398 | Applied Materials Brush Mount Assembly Repair
Call 1-888-736-4476 to check availability.
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0010-14390 | AMAT Roller Washer for Brush Station with Insert Included
Call 1-888-736-4476 to check availability.
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0010-25969 | AMAT Mirra Mesa Brush Mount Assy, 200mm Repair
Call 1-888-736-4476 to check availability.
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0010-25970 | AMAT Mirra Mesa / Reflexion Brush Mount Assy, 200mm for Part Number 0010-25970 – Repair
Call 1-888-736-4476 to check availability.
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0010-77680 | AMAT 0010-77680, ASSY, ELECTRONIC BOX
Call 1-888-736-4476 to check availability.