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853-012123-004 | Harmonic Arm Drive
853-012123-004 | Harmonic Arm Drive

853-012123-004 | LAM Research Harmonic Arm Drive

LAM Harmonic Arm Drive. Condition-REFURBISHED

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool

New Harmonic Core Replacement Option Available To Address Wafer Handling Issues (See Photo)

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SKU 853-012123-004-BO Category

Description

OEM Part Number 853-012123-004

LAM Harmonic Arm Drive. Condition-REFURBISHED

The LAM Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool

New Harmonic Core Replacement Option Available To Address Wafer Handling Issues (See Photo)

Download Datasheet

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