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Parts

300MM AMAT LK Spindle Refurbishment

Download Datasheet

300MM AMAT LK Spindle Refurbishment

Features

General Process Flow

 

Repair

  • Disassembling

  • Clean & Refurbish

  • Replace Parts

  • Assembly


Function Test

  • Rotation

  • UP/Down Function Test

  • Sweep Function Test

  • Rotation Function Test


Q.C

  • Final Q.C

  • Cleaning & Packaging

  • Ready for Shipment