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Parts

20705 | MKS Thin Film Novellus CVD 300mm IREPD Refurbishment

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20705 | MKS Thin Film Novellus CVD 300mm IREPD Refurbishment

Features

Replace or repair

  • Infrared Source

  • Window

  • O-ring

  • Detector

  • Reflective Object Sensor

  • Motor

  • Gear

  • DC-DC converters

  • Detector Board

  • Control Board


Re-zero Test

Final Test

  • Helium leak test (<5.0e-09)

  • Signal 1X (voltage)(0.06~0.14)

  • Signal 20X(voltage)(0.2~1.8)

  • Motor LED Test

  • Source LED Test


Item

  • Accessories Check

  • Final visual check

  • Packing